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Lithography
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Lithography Tool

The Centre is home to state of the art large area electron beam lithography facilities which are used for numerous direct write applications and to produce mask plates for photolithography. Patterning and etching facilities are used to fabricate stamping tools for nanoimprint lithography.

 

 
Lithography
Metallisation
Plasma Processing
Microscopy
Miscellaneous
Partner Facilities
 
 
Electron Beam Lithography
 Vistec VB6 UHR EWF
Photolithography
 SüSS MA6
Nanoimprint Lithography
 Obducat NIL 2.5 Nanoimprinter
 

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